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| Axes travel | X Y Z travel | 410 - 330 - 200 | |
| Super precision | Position accuracy | X,Y | ±0.0004mm |
| Z | ±0.0006mm | ||
| Repeatability | X,Y | ±0.0001mm | |
| Z | ±0.0001mm | ||
| Least input unit | 0.1µm | ||
| Circularity | 1.1µm | ||
| High speed | Spindle speed | 3,000 ~ 36,000 rpm | |
| Z axis time constant | 40 msec (Acceleration 0.6G) | ||
| Micro fine machining | Diameter 0.05 Drilling (SK, NAK, material) | ||
| R0.1 End mill machining (HPM material) | |||
| Massive design | Machine weight 2,500kg | ||
| Overwhelming body stiffness | |||